• DocumentCode
    267918
  • Title

    Thin-film magnesium as a sacrificial and biodegradable material

  • Author

    Yang Liu ; Jungwook Park ; Chang, Jay Han-Chieh ; Yu-chong Tai

  • Author_Institution
    California Inst. of Technol., Pasadena, CA, USA
  • fYear
    2014
  • fDate
    26-30 Jan. 2014
  • Firstpage
    656
  • Lastpage
    659
  • Abstract
    This work reports the study of ebeam-deposited thin-film magnesium (Mg) as a sacrificial and a biodegradable material. We have tested etchants including diluted hydrochloric acid (HCl), saline, and culture medium. Both vertical etching method and channel undercut method are used to characterize the Mg etching properties. The initial results confirm that thin-film Mg is a promising dual sacrificial and biodegradable material. In addition, an etching model, which fits accurately the etching length vs. time over a wide range of HCl concentrations (0.02-1M) is developed. This model is based on diffusion and a combined first-and-second order chemical reaction mechanism.
  • Keywords
    biodegradable materials; electron beam deposition; etching; magnesium; metallic thin films; HCl concentrations; Mg; Mg etching properties; biodegradable material; channel undercut method; culture medium; diffusion; diluted hydrochloric acid; e-beam-deposited magnesium thin film; etchants; etching length; first-and-second order chemical reaction mechanism; sacrificial material; saline medium; vertical etching method; Biodegradable materials; Chemicals; Etching; Hydrogen; Magnesium; Microchannel; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
  • Conference_Location
    San Francisco, CA
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2014.6765726
  • Filename
    6765726