DocumentCode
267918
Title
Thin-film magnesium as a sacrificial and biodegradable material
Author
Yang Liu ; Jungwook Park ; Chang, Jay Han-Chieh ; Yu-chong Tai
Author_Institution
California Inst. of Technol., Pasadena, CA, USA
fYear
2014
fDate
26-30 Jan. 2014
Firstpage
656
Lastpage
659
Abstract
This work reports the study of ebeam-deposited thin-film magnesium (Mg) as a sacrificial and a biodegradable material. We have tested etchants including diluted hydrochloric acid (HCl), saline, and culture medium. Both vertical etching method and channel undercut method are used to characterize the Mg etching properties. The initial results confirm that thin-film Mg is a promising dual sacrificial and biodegradable material. In addition, an etching model, which fits accurately the etching length vs. time over a wide range of HCl concentrations (0.02-1M) is developed. This model is based on diffusion and a combined first-and-second order chemical reaction mechanism.
Keywords
biodegradable materials; electron beam deposition; etching; magnesium; metallic thin films; HCl concentrations; Mg; Mg etching properties; biodegradable material; channel undercut method; culture medium; diffusion; diluted hydrochloric acid; e-beam-deposited magnesium thin film; etchants; etching length; first-and-second order chemical reaction mechanism; sacrificial material; saline medium; vertical etching method; Biodegradable materials; Chemicals; Etching; Hydrogen; Magnesium; Microchannel; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location
San Francisco, CA
Type
conf
DOI
10.1109/MEMSYS.2014.6765726
Filename
6765726
Link To Document