3-D hemispherical micro glass-shell resonator with integrated electrostatic excitation and capacitive detection transducers

This paper reports the development and performance of a 3-D hemispherical micro glass-shell resonator with integrated electrostatic excitation and capacitive detection transducers. A new fabrication method has been developed for a hemispherical micro glass-shell resonator with glass ball molding as well as a self-guided-alignment process to maintain the gap distance between the electrodes and the shell uniform. The fabricated micro glass-shell resonator produced the first vibration mode of resonance at 5.843KHz with a quality factor of 730 at atmosphere with the time decay constant of 39.78ms. The diameter of the fabricated glass-shell resonator was measured as 1mm with shell thickness of 1.2μm.