DocumentCode
267929
Title
An efficient earth magnetic field MEMS sensor: Modelling and experimental results
Author
Bagherinia, M. ; Corigliano, Alberto ; Mariani, Stefano ; Horsley, David A. ; Mo Li ; Lasalandra, E.
Author_Institution
Dept. of Civil & Environ. Eng., Politec. di Milano, Milan, Italy
fYear
2014
fDate
26-30 Jan. 2014
Firstpage
700
Lastpage
703
Abstract
The paper presents the experimental results and performance indexes of a new z-axis Lorentz force MEMS magnetometer with simple design, reduced dimensions and high efficiency. An ad-hoc formulated multi-physics approach is exploited to compute the sensor dynamics. Possible parasitic acceleration sensitivity is mechanically canceled in the proposed device. Optimality of the proposed configuration is discussed by means of an ad hoc formulated parameter optimization approach.
Keywords
geomagnetism; magnetometers; microsensors; optimisation; Earth magnetic field; Lorentz force; MEMS magnetometer; MEMS sensor; acceleration sensitivity; ad-hoc formulated multiphysics; parameter optimization; sensor dynamics; Bandwidth; Lorentz covariance; Magnetic fields; Magnetometers; Micromechanical devices; Optimization; Sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location
San Francisco, CA
Type
conf
DOI
10.1109/MEMSYS.2014.6765737
Filename
6765737
Link To Document