Electric gradient force drive mechanism for novel microscale all-dielectric gyroscope

MEMS vibratory gyroscopes have recently shown great promise in the field of micro-scale position, navigation, and timing (μPNT), yet their performance often falls short of navigation grade due to losses in the vibratory structure. This paper reports a novel drive mechanism used to excite a cylindrical, all-dielectric micro-shell gyroscope structure. The drive mechanism operates by generating a gradient electric field force from a set of interdigitated electrodes placed adjacent to the gyroscope structure. This novel transduction mechanism enables mechanical actuation of a pristine dielectric structure without the need for direct metallization which could degrade the quality factor (Q) and mechanical performance. Mode spectroscopy in the range of 5-50 kHz is demonstrated with mode amplitudes as large as 0.3 μm for a 10 V drive signal. Quality factors of 12,000 have been measured. Design, fabrication, and experimental demonstration are presented.