• DocumentCode
    268000
  • Title

    Liquid droplet micro-bearings on directional circular surface ratchets

  • Author

    Varel, Cagdac ; Bohringer, Karl F.

  • Author_Institution
    Univ. of Washington, Seattle, WA, USA
  • fYear
    2014
  • fDate
    26-30 Jan. 2014
  • Firstpage
    983
  • Lastpage
    986
  • Abstract
    This paper presents de-ionized water droplets used as torque-generating micro-bearings between a glass plate and a micromachined Si substrate. The pattern on the Si substrate includes circular tracks, which allow droplet motion in a single direction. When vertical vibration is applied to the system, a rotation in the transverse plane is triggered. The system can be tailored to respond to a specific vibration frequency, from 36.5 to 83 Hz for droplet volumes from 13 to 1 μL. The system is tested for its frequency response at different droplet sizes and droplet counts. A figure of merit is determined to quantify the responsiveness of the system. The largest angular speed is recorded as 0.302 rad/s for a vibration at 61 Hz.
  • Keywords
    ball bearings; drops; micromachining; micromechanical devices; silicon; Si; circular tracks; deionized water droplets; directional circular surface ratchets; droplet motion; frequency 36.5 Hz to 83 Hz; frequency 61 Hz; frequency response; glass plate; liquid droplet microbearings; micromachined Si substrate; torque-generating microbearings; transverse plane rotation; vertical vibration; vibration frequency; Glass; Liquids; Micromechanical devices; Silicon; Substrates; Tracking; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
  • Conference_Location
    San Francisco, CA
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2014.6765808
  • Filename
    6765808