DocumentCode
2680139
Title
Thermal stress effects on capacitance and current characteristics of Cu/si and Cu/TiN/Si schottky-diodes
Author
Ahrens, C. ; Ferretti, R. ; Friese, G. ; Weidner, J.-O.
Author_Institution
Universitat Hannover
fYear
1997
fDate
16-19 March 1997
Firstpage
56
Lastpage
58
Keywords
Capacitance; Capacitance-voltage characteristics; Copper; Frequency; Metallization; Schottky diodes; Space charge; Temperature dependence; Thermal stresses; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location
Villard de Lans, France
ISSN
1266-0167
Type
conf
DOI
10.1109/MAM.1998.887512
Filename
887512
Link To Document