Biaxial strain in suspended graphene membranes for piezoresistive sensing

Pressure sensors based on suspended graphene membranes have shown extraordinary sensitivity for uniaxial strains, which originates from graphene´s unique electrical and mechanical properties and thinness [1]. This work compares through both theory and experiment the effect of cavity shape and size on the sensitivity of piezoresistive pressure sensors based on suspended graphene membranes. Further, the paper analyzes the effect of both biaxial and uniaxial strain on the membranes. Previous studies examined uniaxial strain through the fabrication of long, rectangular cavities. The present work uses circular cavities of varying sizes in order to obtain data from biaxially strained graphene membranes.