DocumentCode

2680438

Title

Arsenic solubility in single crystalline cobalt disilicide

Author

Mangelinck, D. ; Cardenas, J. ; Svensson, B.G.

Author_Institution

Royal Institut of Technolqy, Solid State Electronics

fYear

1997

fDate

16-19 March 1997

Firstpage

120

Lastpage

121

Keywords

Annealing; Boron; Cobalt; Crystallization; Inorganic materials; Metallization; Silicides; Silicon; Solids; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887535

Filename

887535