• DocumentCode
    2680559
  • Title

    Modification of Al - based metallization for improved surface morphology

  • Author

    Zaborowski, Michal ; Barcz, A.

  • Author_Institution
    Institute of Electron Technology
  • fYear
    1997
  • fDate
    16-19 March 1997
  • Firstpage
    134
  • Lastpage
    135
  • Keywords
    Aluminum alloys; Annealing; Artificial intelligence; Chromium alloys; Copper alloys; Grain boundaries; Inorganic materials; Integrated circuit metallization; Silicon alloys; Surface morphology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
  • Conference_Location
    Villard de Lans, France
  • ISSN
    1266-0167
  • Type

    conf

  • DOI
    10.1109/MAM.1998.887544
  • Filename
    887544
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2680559