A UHF 4th-order band-pass filter based on contour-mode PZT-on-Silicon resonators

Author

Yagubizade, Hadi ; Darvishi, Mostafa ; Elwenspoek, Miko C. ; Tas, Niels R.

Author_Institution

MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

1237

Lastpage

1240

Abstract

A UHF 4th-order band-pass filter (BPF) based on the subtraction of two 2nd-order contour-mode resonators with slightly different resonance frequencies is presented. The resonators consists of a 1 μm pulsed-laser deposited (PLD) lead zirconate titanate (PZT) thin-film on top of a 3 μm silicon (PZT-on-Si). The resonators are actuated in-phase and their outputs are subtracted. Utilizing this technique, the outputs of the resonators are added up constructively while the feed-through signals are eliminated. The BPF presented a bandwidth of approximately 28.6 MHz and more than 30 dB stopband rejection at around 700 MHz.

Keywords

UHF filters; band-pass filters; crystal resonators; dielectric resonator filters; lead compounds; pulsed laser deposition; PZT-Si; UHF filter; contour mode resonator; fourth order band-pass filter; pulsed laser deposited coating; size 1 mum; size 3 mum; Band-pass filters; Bandwidth; Frequency measurement; Insertion loss; Resonant frequency; Silicon; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765872

Filename

6765872