DocumentCode

2680734

Title

Optimized indium oxide films prepared by DC magnetron sputtering

Author

Axelevitch, A. ; Rabinovitch, E. ; Golan, G.

Author_Institution

Center for Technological Education and The Open University Israel

fYear

1997

fDate

16-19 March 1997

Firstpage

162

Lastpage

162

Keywords

Argon; Coatings; Conductive films; Conductivity; Glass; Indium; Mathematical model; Optical films; Process control; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887557

Filename

887557