• DocumentCode
    2680886
  • Title

    Epitaxial CoSi2 formation by Co/Hf bilayers on Si

  • Author

    Gebhardt, B. ; Falke, M. ; Giesler, H. ; Teichert, S. ; Beddies, G. ; Hinneberg, H.-J.

  • Author_Institution
    TU Chemnitz-Zwickau, Institut fur Physik
  • fYear
    1997
  • fDate
    16-19 March 1997
  • Firstpage
    184
  • Lastpage
    184
  • Keywords
    Conductivity; Hafnium; Magnetic materials; Plasma measurements; Plasma temperature; Rapid thermal annealing; Solids; Substrates; Temperature distribution; Zirconium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
  • Conference_Location
    Villard de Lans, France
  • ISSN
    1266-0167
  • Type

    conf

  • DOI
    10.1109/MAM.1998.887567
  • Filename
    887567
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2680886