EXAFS investigation of Co sites in CoSi₂ film grown by ion beam assisted deposition

Author

Terrasi, A. ; La Via, F. ; Acapito, F.D. ; Mobilio, S.

Author_Institution

Istituto Nazionale di Metodologie e Tecnologie per la Microelettronica - CNR

fYear

1997

fDate

16-19 March 1997

Firstpage

189

Lastpage

190

Keywords

Annealing; Argon; Atherosclerosis; Cobalt; Current density; Fourier transforms; Inorganic materials; Ion beams; Metallization; Silicides;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

DOI

10.1109/MAM.1998.887569

Filename

887569

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