• DocumentCode
    2683026
  • Title

    Double layers in a plasma with negative ions

  • Author

    Merlino, Robert L. ; Loomis, J.J.

  • fYear
    1990
  • fDate
    21-23 May 1990
  • Firstpage
    125
  • Abstract
    Summary form only given. The formation of double layers in a plasma containing positive ions, negative ions, and electrons is being investigated. This work is done in a triple plasma device with two independent plasma discharge sources operating in argon at pressure on the order of 10-5-10-4 torr. The double layers are produced by applying a potential difference between the two independently produced plasmas. In Ar+ /e- plasmas, the double layers are characterized by potential differences eV/kTe~10-30. The negative ion plasmas are produced by adding small amounts of SF6 gas into the argon ion/electron plasma. The plasma electrons readily attach to the SF6 molecules to form a plasma with Ar+, e-, and SF6- ions, although other negative ion species as well as additional positive ions may also be present. In one typical case investigated extensively, the addition of SF6 results in the formation of a potential structure in which the overall potential drop present in the pure Ar+/e- double layer is distributed over two smaller double layers over a more extended axial region
  • Keywords
    electron attachment; negative ions; plasma collision processes; plasma sheaths; 10-5 to 10-4 torr; Ar; Ar+; SF6 gas; SF6-Ar; double layers; electron attachment; extended axial region; negative ions; plasma; plasma electrons; positive ions; potential difference; triple plasma device; two independent plasma discharge sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1990. IEEE Conference Record - Abstracts., 1990 IEEE International Conference on
  • Conference_Location
    Oakland, CA, USA
  • Type

    conf

  • DOI
    10.1109/PLASMA.1990.110611
  • Filename
    5725887