Groove gratings surface transverse wave resonators

This paper is devoted to the fabrication, calculation and testing of STW resonator-like structures mixing metal strip and groove grating for the excitation and detection of STW on AT-cut quartz. These developments consist in an adaptation of previous models but also in an improved analysis of electrical boundary conditions. Different devices have been fabricated following the exposed process. The electrical responses of these devices are then reported. The influence of groove depth and metal strip height on the electrical characteristics of the studied devices is finally discussed