• DocumentCode
    2684529
  • Title

    Electric field dependence of TDDB activation energy in ultrathin oxides

  • Author

    Vincent, E. ; Evil, N. ; Papadas, C. ; Ghibaudo, G.

  • Author_Institution
    SGS-THOMSON Microelectronics
  • fYear
    1996
  • fDate
    1996
  • Firstpage
    1643
  • Lastpage
    1646
  • Keywords
    Acceleration; Attenuation; Capacitors; Electric breakdown; Extrapolation; Life estimation; Lifetime estimation; Microelectronics; Stress; Temperature dependence;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
  • Print_ISBN
    0-7803-3369-1
  • Type

    conf

  • DOI
    10.1109/ESREF.1996.888181
  • Filename
    888181