DocumentCode
2685606
Title
Microdac - a novel approach to measure in situ deformation fields of microscopic scale
Author
Vogel, D. ; Schubert, A. ; Faust, W. ; Dubek, R. ; Michel, B.
Author_Institution
Fraunhofer Institute of Reliability and Microintegration
fYear
1996
fDate
1996
Firstpage
1939
Lastpage
1942
Keywords
Assembly; Capacitive sensors; Displacement measurement; Electron optics; Optical imaging; Optical materials; Optical microscopy; Packaging; Pixel; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN
0-7803-3369-1
Type
conf
DOI
10.1109/ESREF.1996.888250
Filename
888250
Link To Document