DocumentCode
2693727
Title
Fabrication of a single-crystal Bragg mirror for solidly-mounted resonators and transducers
Author
Baron, T. ; Lebrasseur, Eric ; Alzuaga, Sebastien ; Haixia Wang ; Bassignot, F. ; Boy, J.-J. ; Ballandras, S. ; Couteleau, L.
Author_Institution
FEMTO-ST, Univ. de Franche-Comte, Besancon, France
fYear
2012
fDate
7-10 Oct. 2012
Firstpage
543
Lastpage
546
Abstract
In this work, we propose a Bragg mirror for Quartz resonator at 10MHz. Two processes based on bonding and thinning wafers is proposed. A stack of ten bonding and thinning wafers is realized. Ultrasonic characterization shows the behavior of the Bragg mirror and the evolution versus the number of layer stack. Resonators on such Bragg mirror show less spurious signal but need improvement about quality factor of resonator.
Keywords
Bragg gratings; bulk acoustic wave devices; crystal resonators; mirrors; ultrasonic transducers; wafer bonding; bonding wafers; frequency 10 MHz; quartz resonator; single-crystal Bragg mirror fabrication; solidly-mounted resonator; spurious signal; thinning wafers; transducers; ultrasonic characterization; Acoustics; Bonding; Gold; Lapping; Mirrors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location
Dresden
ISSN
1948-5719
Print_ISBN
978-1-4673-4561-3
Type
conf
DOI
10.1109/ULTSYM.2012.0135
Filename
6562364
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