• DocumentCode
    2693964
  • Title

    Nickel doped PZT type ceramics for displacement microsystems

  • Author

    Miclea, C. ; Tanasoiu, C. ; Spanulescu, S. ; Miclea, C.F.

  • Author_Institution
    Hyperion Univ., Bucharest, Romania
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    483
  • Abstract
    A soft PZT type material was prepared by the usual ceramic technique and was doped with Ni. Doping levels of about 20 at.% provided piezoelectric materials with improved characteristics. Thus the electromechanical planar coupling coefficient increased to 0.64, the relative dielectric constant to nearly 5500 and the piezoelectric charge constant d33 to over 800·10-12 m/N. Such materials are extremely suitable for actuators and micromotors applications
  • Keywords
    lead compounds; microactuators; nickel; permittivity; piezoceramics; piezoelectric actuators; PZT:Ni; PbZrO3TiO3:Ni; actuator; dielectric constant; displacement microsystem; electromechanical planar coupling coefficient; micromotor; nickel doped PZT ceramic; piezoelectric charge constant; piezoelectric material; Ceramics; Conducting materials; Dielectric materials; Doping; Micromotors; Milling; Nickel; Piezoelectric actuators; Piezoelectric materials; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2000. CAS 2000 Proceedings. International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-5885-6
  • Type

    conf

  • DOI
    10.1109/SMICND.2000.889137
  • Filename
    889137