DocumentCode
2695037
Title
On the optimization of piezoelectrically actuated MEMS resonators
Author
Frangi, Alejandro ; Cremonesi, Massimiliano ; Jaakkola, Anttoni ; Pensala, Tuomas
Author_Institution
Dept. of Struct. Eng., Politec. di Milano, Milan, Italy
fYear
2012
fDate
7-10 Oct. 2012
Firstpage
1043
Lastpage
1046
Abstract
We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.
Keywords
circuit optimisation; crystal resonators; microactuators; micromechanical resonators; numerical analysis; interfacial losses; numerical analysis; pattern optimization; piezo MEMS square extensional resonators; piezoelectrically actuated MEMS resonators optimization; piezolayer; selected mechanical modes; stress jump; viscous dissipation type; Acoustics; Electrodes; Materials; Micromechanical devices; Optimization; Q-factor; Strain;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location
Dresden
ISSN
1948-5719
Print_ISBN
978-1-4673-4561-3
Type
conf
DOI
10.1109/ULTSYM.2012.0261
Filename
6562436
Link To Document