Vertically arranged microelectrode array for electrochemical sensing

Author

Rebacek, V. ; Novotny, I. ; Ivanic, R. ; Breternitz, V. ; Spiess, L. ; Knedlik, Ch ; Tvarozek, V.

Author_Institution

Fac. of Electr. Eng. & Inf. Technol., Slovak Tech. Univ., Bratislava, Slovakia

fYear

2000

fDate

2000

Firstpage

421

Lastpage

424

Abstract

We have developed a thin film cell consisting of a vertically arranged interdigital array (IDA) of electrodes with a continuous Pt-basis and an Y₂O₃ insulation layer in the middle separating the upper Pt IDA electrodes. We have optimized the technology of preparation of Y₂O₃ thin films with suitable electrical and mechanical properties. The electrochemical cell has been tested by cyclic voltammetry using the redox couple [Fe(CN)₆]^3-/4- in an electrolyte and the redox recycling phenomenon was demonstrated under these conditions

Keywords

arrays; electrochemical electrodes; electrochemical sensors; microelectrodes; platinum; sputter deposition; voltammetry (chemical analysis); yttrium compounds; Fe(CN)₆; Pt-Y₂O₃; Y₂O₃ insulation layer; [Fe(CN)₆]^3-/4-; continuous Pt-basis; cyclic voltammetry; electrical properties; electrochemical cell; electrochemical sensing; mechanical properties; redox couple; redox recycling phenomenon; thin film cell; vertically arranged interdigital array; vertically arranged microelectrode array; Compressive stress; Crystallography; Mechanical factors; Mechanical variables measurement; Microelectrodes; Optical films; Resists; Sputtering; Stress measurement; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on

Conference_Location

Smolenice

Print_ISBN

0-7803-5939-9

Type

conf

DOI

10.1109/ASDAM.2000.889535

Filename

889535