Design of a micro six-axis force sensor based on double layer E-type membrane

Author

Yang, Weichao ; Song, Bo ; Yu, Yong ; Ge, Yunjian

Author_Institution

Inst. of Intell. Machines, Chinese Acad. of Sci., Hefei

fYear

2008

fDate

20-23 June 2008

Firstpage

1632

Lastpage

1636

Abstract

The elastic body structure of six-axis force sensor based on the double layer E-type membrane has been used in the normal situation maturely. In this paper, the possibility of the same elastic body structure used in the micro-operation is discussed. The working principle of the sensor structure is introduced firstly, and the static and dynamic characteristics of the elastic body are obtained by finite element analysis. The results demonstrate that six-axis force sensor with this kind of structure can be used in micro-operation and the sensor has high sensitivities, high linearity and almost no static couple in each axis.

Keywords

finite element analysis; force sensors; membranes; microsensors; double layer E-type membrane; dynamic characteristics; elastic body structure; finite element analysis; microoperation; microsix-axis force sensor design; static characteristics; Biomembranes; Capacitive sensors; Design automation; Finite element methods; Flanges; Force measurement; Force sensors; Intelligent sensors; Machine intelligence; Sensor phenomena and characterization; Double layer E-type membrane; Elastic body; Finite elements method; Six-axis force sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Information and Automation, 2008. ICIA 2008. International Conference on

Conference_Location

Changsha

Print_ISBN

978-1-4244-2183-1

Electronic_ISBN

978-1-4244-2184-8

Type

conf

DOI

10.1109/ICINFA.2008.4608265

Filename

4608265