Cavity-backed MEMS patch antennas on double-layer silicon wafers

Author

Koga, Yoko ; Yoshida, Yukihisa ; Yamashita, Akira ; Hamaguchi, Tsuneo ; Nishizawa, Kazushi ; Taguchi, Motohisa ; Nishino, Tamotsu ; Miyashita, Hiroaki ; Makino, Shigeru

Author_Institution

Inf. Technol. R&D Center, Mitsubishi Electr. Corp., Kamakura

fYear

2006

fDate

9-14 July 2006

Firstpage

3935

Lastpage

3938

Abstract

This paper presents cavity-backed patch antennas on a double-layer silicon wafer. The developed antenna has flexibility for obtaining the desired equivalent dielectric constant under the limit of the wafer thickness, because a depth of cavity on each wafer can be adjusted with each other. The wide band characteristic of this antenna has been shown by simulation, and the experimental results at millimeter wave have also been presented

Keywords

broadband antennas; micromechanical devices; microstrip antennas; millimetre wave antennas; permittivity; silicon; cavity depth; cavity-backed MEMS patch antennas; double-layer silicon wafers; equivalent dielectric constant; millimeter wave; wafer thickness; wide band characteristic; Antennas and propagation; Bandwidth; Dielectric losses; Micromechanical devices; Microstrip antennas; Patch antennas; Radio frequency; Research and development; Resins; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas and Propagation Society International Symposium 2006, IEEE

Conference_Location

Albuquerque, NM

Print_ISBN

1-4244-0123-2

Type

conf

DOI

10.1109/APS.2006.1711486

Filename

1711486