• DocumentCode
    2710324
  • Title

    National Nanofabrication Centre at IISc Bangalore: A Chronicle of Design, Construction and Management of Cleanroom in Indian Context

  • Author

    Murthy, Tums ; Vijayaraghavan, M.N. ; Savitha, P. ; Hegde, Gopal ; Raghavan, Srinivasan ; Kumar, P. S Anil ; Pratap, Rudra ; Bhat, Navakanta

  • Author_Institution
    Centre for Nano Sci. & Eng., Indian Inst. of Sci., Bangalore, India
  • fYear
    2012
  • fDate
    9-10 July 2012
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology used to manage the facility, challenges in staffing to run the facility and balancing the time sharing between internal and external users will be discussed.
  • Keywords
    clean rooms; nanofabrication; IISc Bangalore; Indian Institute of Science Bangalore; Indian context; cleanroom; multiuser open access nanofab facility; national nanofabrication centre; Context; Contracts; Educational institutions; Materials processing; Nanoelectronics; Nanofabrication; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial
  • Conference_Location
    Berkeley, CA
  • ISSN
    0749-6877
  • Print_ISBN
    978-1-4577-1751-2
  • Electronic_ISBN
    0749-6877
  • Type

    conf

  • DOI
    10.1109/UGIM.2012.6247096
  • Filename
    6247096