DocumentCode
2710324
Title
National Nanofabrication Centre at IISc Bangalore: A Chronicle of Design, Construction and Management of Cleanroom in Indian Context
Author
Murthy, Tums ; Vijayaraghavan, M.N. ; Savitha, P. ; Hegde, Gopal ; Raghavan, Srinivasan ; Kumar, P. S Anil ; Pratap, Rudra ; Bhat, Navakanta
Author_Institution
Centre for Nano Sci. & Eng., Indian Inst. of Sci., Bangalore, India
fYear
2012
fDate
9-10 July 2012
Firstpage
1
Lastpage
1
Abstract
We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology used to manage the facility, challenges in staffing to run the facility and balancing the time sharing between internal and external users will be discussed.
Keywords
clean rooms; nanofabrication; IISc Bangalore; Indian Institute of Science Bangalore; Indian context; cleanroom; multiuser open access nanofab facility; national nanofabrication centre; Context; Contracts; Educational institutions; Materials processing; Nanoelectronics; Nanofabrication; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial
Conference_Location
Berkeley, CA
ISSN
0749-6877
Print_ISBN
978-1-4577-1751-2
Electronic_ISBN
0749-6877
Type
conf
DOI
10.1109/UGIM.2012.6247096
Filename
6247096
Link To Document