Electrochemical characterization of titanium nitride microelectrode arrays for charge-injection applications

Author

Zhou, D.M. ; Greenberg, R.J.

Author_Institution

LLC, Sylmar, CA, USA

Volume

2

fYear

2003

fDate

17-21 Sept. 2003

Firstpage

1964

Abstract

A key issue in the development of neural prosthetic systems has been the selection of appropriate electrode materials. Titanium Nitride (TIN) offers several advantages including higher surface area provided by its columnar structure and capacitive charge-injection process. Both dc and ac electrochemical techniques were employed in the study. The results showed that no oxidation and reduction peaks were observed within water window potentials. TiN surface was stable when stimulated by a charge balanced biphasic current pulse within the water window. Gassing on the electrode surface appears damaging TiN coating and causing loss of charge injection capacity.

Keywords

bioelectric potentials; biomedical electrodes; biomedical materials; charge injection; electrochemistry; eye; microelectrodes; neurophysiology; prosthetics; titanium compounds; TiN; capacitive charge-injection process; charge balanced biphasic current pulse; columnar structure; electrochemical characterization; microelectrode arrays; neural prosthetic systems; titanium nitride; water window potentials; Coatings; Electrodes; Microelectrodes; Neural prosthesis; Prosthetics; Retina; Semiconductor thin films; Substrates; Tin; Titanium;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 2003. Proceedings of the 25th Annual International Conference of the IEEE

ISSN

1094-687X

Print_ISBN

0-7803-7789-3

Type

conf

DOI

10.1109/IEMBS.2003.1279831

Filename

1279831