Design and simulations for a calorimetric micro-sensor for methane detection

Author

Sosin, Sebastian ; Moldovan, Carmen ; Iosub, Rodica

Author_Institution

IMT, Bucharest, Romania

Volume

2

fYear

2004

fDate

4-6 Oct. 2004

Firstpage

381

Abstract

This work consists of two sections: design and simulations of a calorimetric methane sensor. In the first part, the technology steps and the masks are presented. The sensor is built on a suspended membrane released using front side sacrificial etch or back side anisotropic etch. The sensitive element is a platinum temperature sensor covered with a layer of doped porous alumina. The second part shows several electrothermal simulations that show the ability of the sensor to operate at temperatures over 300 Celsius using voltages below 10 volts.

Keywords

calorimetry; finite element analysis; gas sensors; masks; microsensors; organic compounds; temperature sensors; back side anisotropic etch; calorimetric microsensor; doped porous alumina; electrothermal simulations; finite element analysis; front side sacrificial etch; masks; methane detection; platinum temperature sensor; sensitive element; suspended membrane; Anisotropic magnetoresistance; Biomembranes; Bridge circuits; Ceramics; Energy consumption; Etching; Platinum; Silicon; Temperature sensors; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International

Print_ISBN

0-7803-8499-7

Type

conf

DOI

10.1109/SMICND.2004.1403024

Filename

1403024