High power laminate MEMS RF switch

An innovative high power radio frequency switch designed and manufactured using LMEMS (Laminate Micro Electro-Mechanical System) is reported. The LMEMS technology is developed by adopting current multi-layered printed circuit board (PCB) manufacturing technology, and integrating it with laminated layers including moving parts and specialty materials. RF switch performance is achieved by optimizing device design and layout for improving offstate isolation and reducing on-state insertion loss. High power performance is realized by use of laminate PCB technology and special contact metallurgy suitable for reducing both hot switching and high current welting. A RF LMEMS switch design is demonstrated to function up to 10 GHz and 50 W power handling capability.