Pt deposition effect for the catalyst of the semiconducting oxygen sensor

Author

Cho, Seong-Soon ; Kim, Ho-Gi

Author_Institution

Dept. of Mater. Sci. & Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea

Volume

2

fYear

1996

fDate

18-21 Aug 1996

Firstpage

983

Abstract

La-doped SrTiO₃ thick film has been studied from the viewpoint of its application for a lambda sensor, especially the effect of Pt deposition as a catalyst at low temperature. The as-deposited film was transformed into fine particles less than 0.1 μm and distributed very homogeneously on the surface. The response of the sensor was more symmetric and fastened with the aid of Pt particles. However, it was difficult to overcome the nonsymmetric behavior perfectly

Keywords

catalysts; ferroelectric devices; ferroelectric semiconductors; gas sensors; platinum; sputtered coatings; strontium compounds; thick film devices; 0.1 mum; La-doped SrTiO₃ thick film; O₂; Pt; Pt deposition effect; SrTiO₃:La; as-deposited film; catalyst; fine particles; lambda sensor; low temperature; nonsymmetric behavior; semiconducting oxygen sensor; Combustion; Magnetic sensors; Materials science and technology; Oxygen; Semiconductivity; Sensor phenomena and characterization; Sputtering; Temperature sensors; Thick film sensors; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on

Conference_Location

East Brunswick, NJ

Print_ISBN

0-7803-3355-1

Type

conf

DOI

10.1109/ISAF.1996.598193

Filename

598193