A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

Testing and characterization of micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test MEMS and MOEMS especially to examine motions, deflections and resonance frequencies. This paper presents a fast-developing and low-cost environment for MEMS and MOEMS testing and characterization. The environment is based on a flexible mixed-signal platform, named ISIF (intelligent sensor interface). As a case study we consider the characterization of a double axis scanning micromirror. The testing environment has been validated by comparing measurement results with results obtained by finite element method simulation performed with Comsol Multiphysicstrade. Finally, these results have been used to create an electrical equivalent model of the micromirror.