• DocumentCode
    2725886
  • Title

    Electrical transport mechanism in VO2 thin films

  • Author

    Golan, G. ; Axelevitch, A.

  • Author_Institution
    Fac. of Eng., Holon Inst. of Technol. - HIT, Holon, Israel
  • fYear
    2010
  • fDate
    16-19 May 2010
  • Firstpage
    141
  • Lastpage
    144
  • Abstract
    Vanadium oxide (VO2) transforms from a semiconductor phase to a metal phase at a temperature of 67°C. This phase transformation is accompanied by a dramatically change in its electrical and optical properties. Therefore, vanadium oxide thin films are very attractive for switching applications. This paper presents the optical and electrical properties of vanadium oxide thin films deposited by vacuum thermal evaporation of metallic vanadium following by oxidation. We have studied the electro-physical behavior of these VO2 films during their phase transition. It was shown that the electrical transport mechanism of the obtained vanadium oxide films differs in low and high electrical fields. In low electrical fields, conductivity is obtained by the Schottky transport mechanism, whereas in high electrical fields conductivity ranges from Ohmic mechanism for relatively low fields, to Poole-Frenkel mechanism for higher fields. FTIR and near IR reflectance characteristics of the obtained films are presented.
  • Keywords
    Fourier transform spectra; Poole-Frenkel effect; Schottky effect; electrical conductivity transitions; infrared spectra; oxidation; thin films; vacuum deposition; vanadium compounds; FTIR spectra; Ohmic mechanism; Poole-Frenkel mechanism; Schottky transport; VO2; electrical conductivity; electrophysical properties; near IR reflectance spectra; oxidation; semiconductor-metal phase transformation; temperature 67 degC; vacuum thermal evaporation; vanadium oxide thin films; Conductivity; Electric variables measurement; Electrical resistance measurement; Optical films; Oxidation; Reflectivity; Semiconductor thin films; Substrates; Temperature; Vacuum systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Proceedings (MIEL), 2010 27th International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    978-1-4244-7200-0
  • Type

    conf

  • DOI
    10.1109/MIEL.2010.5490513
  • Filename
    5490513