DocumentCode
2728391
Title
Organic optical waveguide fabrication in a manufacturing environment
Author
Chan, Benson ; Lin, How ; Carver, Chase ; Huang, Jianzhuang ; Berry, Jessie
Author_Institution
Endicott Interconnect Technol., Endicott, NY, USA
fYear
2010
fDate
1-4 June 2010
Firstpage
2012
Lastpage
2018
Abstract
Optical waveguides based on organic materials have been fabricated in a laboratory environment but the scaling and manufacturing processes needed to produce these waveguides have been scant. The volume production of low loss organic waveguides in a conventional state of the art Printed Circuit Board (PCB) manufacturing plant has proven to be challenging both from processing and equipment set perspectives. In collaboration with IBM and Dow Chemicals, Endicott Interconnect (EI) has developed scalable processes that can be implemented in a manufacturing environment. Our contribution is to refine and adapt the processes developed by our collaborators to provide the basic frame work required for the volume manufacturing of organic optical waveguides. The resulting organic optical waveguide yields and cost are the most important consideration in this development work. In this paper, we will show various organic optical waveguide samples using the fabrication methods developed in this work. A detailed discussion of: all the processes, materials and equipment sets that are employed in the fabrication of the organic optical waveguides will be presented. The preparation of substrates to be used as the base for waveguide build up layers is described. The need for clean room processing steps for the subsequent fabrication of optical layers will be explained. Rational of fabrication tool set and process selection will be discussed. Loss measurement test equipments and test strategy of organic optical waveguides will also be described. Finally, waveguide reliability and loss measurement results will be presented.
Keywords
optical fabrication; optical loss measurement; optical waveguides; loss measurement test equipments; manufacturing environment; organic optical waveguide fabrication; waveguide reliability; Collaborative work; Loss measurement; Manufacturing processes; Optical device fabrication; Optical interconnections; Optical losses; Optical waveguides; Organic materials; Planar waveguides; Production;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC), 2010 Proceedings 60th
Conference_Location
Las Vegas, NV
ISSN
0569-5503
Print_ISBN
978-1-4244-6410-4
Electronic_ISBN
0569-5503
Type
conf
DOI
10.1109/ECTC.2010.5490669
Filename
5490669
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