DocumentCode
2731262
Title
Molar concentration effect on MgO thin films properties
Author
Zulkefle, Habibah ; Ismail, Lyly Nyl ; Bakar, Raudah Abu ; Mahmood, Mohamad Rusop
Author_Institution
NANO- Electron. Centre (NET), Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
fYear
2011
fDate
25-28 Sept. 2011
Firstpage
468
Lastpage
471
Abstract
Magnesium Oxide, MgO is inorganic material with wide band gap (7.8eV) and suitable to be used as dielectric layer. Due to its chemical and structural properties, MgO also can be used as template to prepare ferroelectric thin film [1-3]. In this work, MgO thin films with different molar concentration from 0.1M to 1M were prepared using sol-gel spin coating technique. Magnesium acetate tetrahydrate, ethanol and nitric acid were used as precursor, solvent and stabilizer respectively. The MgO thin films were deposited on the glass substrate and subjected to electrical and structural characterizations. Both electrical and structural characterizations were performed using two point probes (BUKOH KEIKI-EP2000), surface profiler (Veeco) and atomic force microscope respectively. The experimental results show that the thin films resistivity increased from 5.09 ×103 Ω.cm to 2.33 ×104 Ω.cm as the precursor molar concentration increased. The MgO films with 0.4M was observed to be the best MgO films to be used as dielectric layer due to its electrical and structural properties which are uniform, non-porous and small particle size around 43nm.
Keywords
atomic force microscopy; electrical resistivity; magnesium compounds; particle size; sol-gel processing; spin coating; thin films; MgO; SiO2; atomic force microscopy; electrical properties; electrical resistivity; ethanol; ferroelectric thin film; glass substrate; inorganic material; magnesium Oxide; magnesium acetate tetrahydrate; molar concentration effect; nitric acid; particle size; sol-gel spin coating; structural properties; surface profiler; thin films; wide band gap material; Conductivity; Dielectric constant; Films; Surface morphology; Surface treatment; Magnesium oxide; dielectric constant; molar concentration; nano size; sonication;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics and Applications (ISIEA), 2011 IEEE Symposium on
Conference_Location
Langkawi
Print_ISBN
978-1-4577-1418-4
Type
conf
DOI
10.1109/ISIEA.2011.6108754
Filename
6108754
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