Biochemical sensing with an arrayed silicon nanowire platform

Author

Ravindran, R. ; Sadie, J.A. ; Scarberry, K.E. ; Yang, H.S. ; Bakir, M.S. ; McDonald, J.F. ; Meindl, J.D.

Author_Institution

Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2010

fDate

1-4 June 2010

Firstpage

1015

Lastpage

1020

Abstract

In this paper, we present our vision of a highly scalable arrayed biochemical sensor platform. This platform combines the advantages of refined and entrenched technologies like top-down integrated circuit fabrication and clinical assays with emerging technologies like three-dimensional stacking and label-free sensing. We demonstrate fabrication concepts and preliminary sensing results on ovarian cell lines prior to engaging in a discussion about relevant applications with regard to the exciting recent advances in genomics and oncology.

Keywords

CMOS integrated circuits; biochemistry; biomedical electronics; biomedical materials; biosensors; cancer; cellular biophysics; genomics; nanobiotechnology; nanofabrication; nanowires; optical images; polymers; scanning electron microscopy; silicon; stacking; tumours; Si; arrayed silicon nanowire; biochemical sensor; clinical assay; genomics; label-free sensing; oncology; ovarian cell line; three-dimensional stacking; top-down integrated circuit fabrication; Acoustic sensors; Biosensors; Electrodes; Fabrication; Integrated circuit technology; Optical sensors; Sensor arrays; Silicon; Stacking; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference (ECTC), 2010 Proceedings 60th

Conference_Location

Las Vegas, NV

ISSN

0569-5503

Print_ISBN

978-1-4244-6410-4

Electronic_ISBN

0569-5503

Type

conf

DOI

10.1109/ECTC.2010.5490826

Filename

5490826