Design and Fabrication of Micro-Compliant Amplifier with Topology Optimal Compliant Mechanism Integrated with a Piezoelectric Microactuator

This paper describes the new way that using topology optimum compliant mechanism and PZT microactuator to design a large force and compliant amplifier mechanism. The common shorting of the microactuator devices is the relation of inverse ratio appears between the output force and output displacement. The mechanism uses the PZT microactuator to be the input and utilize the compliant mechanism to enhance the output displacement. This study uses the PZT microactuator that has 3000mum length, 2000mum width, 500mum thickness and analyses the different performance of microactuator with different applied voltages, width of beam and thickness. In the study, we define the compliant amplifier design domain as 4000mum times 5000mum, thickness as 500mum, and discuss the effect for different optimization parameters. The driving input is a PZT microactuator that can actuate about 6000muN output force to the displacement amplifier and consequently the device can generate about 28mum output displacement when two voltages are applied