DocumentCode
2735824
Title
UV photodetectors from B-doped diamond film
Author
Thaiyotin, L. ; Phetchakul, T. ; Cheirsirikul, S. ; Supadech, S.
Author_Institution
Fac. of Eng., King Mongkut´´s Inst. of Technol., Bangkok, Thailand
Volume
3
fYear
2000
fDate
2000
Firstpage
230
Abstract
The diamond film synthesized on silicon substrate by hot-filament CVD has been used to fabricate photoconductive and photodiode structures for the detection of UV light. The photoconductive device which the higher boron doped has a greater different response between UV light and visible light more than the lower one, but it has more dark current and response time. The Al Schottky photodiode fabricated on the B-doped diamond film showed lower dark current and shorter response time than photoconductive device
Keywords
CVD coatings; boron; diamond; elemental semiconductors; photoconducting devices; photodetectors; photodiodes; semiconductor thin films; ultraviolet detectors; Al Schottky photodiode; C:B; C:B-Al; UV photodetector; boron doped diamond film; dark current; hot filament CVD; photoconductive device; response time; silicon substrate; Boron; Dark current; Delay; Photoconducting devices; Photoconductivity; Photodetectors; Photodiodes; Semiconductor films; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
TENCON 2000. Proceedings
Conference_Location
Kuala Lumpur
Print_ISBN
0-7803-6355-8
Type
conf
DOI
10.1109/TENCON.2000.892263
Filename
892263
Link To Document