21.1 % efficient perc silicon solar cells on large scale by using inline sputtering for metallization

This work presents the first results for the production of highly efficient solar cells with industrial processes using the PERC structure. Two batches of FZ and Cz wafers were conducted to prove the applicability of a transfer from the clean room to an industrial standard. The front and rear side metallization was done by a new pilot system using the sputtering technology. The investigation of solar cell results, series resistance, contact resistance and a optical analysis are discussed later on.