DocumentCode
2737141
Title
Production ready noval texture etching process for fabrication of single crystalline silicon solar cells
Author
Wijekoon, Kapila ; Weidman, Timothy ; Paak, Steve ; MacWilliams, Kenneth
Author_Institution
Appl. Mater., Santa Clara, CA, USA
fYear
2010
fDate
20-25 June 2010
Abstract
We have very successfully developed a novel, IPA free chemical etching process for texturing single crystalline silicon substrates by employing polymer additives with aqueous KOH. In this paper we describe the successful implementation of this IPA free novel texturization process in our baseline single crystalline solar cell flow. The results have been validated with a number of repeated extended run production data. Solar cells fabricated with multiple wafer lots consistently exhibit cell efficiencies greater than 17.5%. It is found that surface texturing capability of this chemistry is slightly better than that of the established KOH/IPA process.
Keywords
elemental semiconductors; etching; solar cells; surface texture; Si; chemical etching process; polymer additive; single crystalline silicon solar cell; texture etching process; Chemicals; Optical reflection;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference (PVSC), 2010 35th IEEE
Conference_Location
Honolulu, HI
ISSN
0160-8371
Print_ISBN
978-1-4244-5890-5
Type
conf
DOI
10.1109/PVSC.2010.5614441
Filename
5614441
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