• DocumentCode
    2737141
  • Title

    Production ready noval texture etching process for fabrication of single crystalline silicon solar cells

  • Author

    Wijekoon, Kapila ; Weidman, Timothy ; Paak, Steve ; MacWilliams, Kenneth

  • Author_Institution
    Appl. Mater., Santa Clara, CA, USA
  • fYear
    2010
  • fDate
    20-25 June 2010
  • Abstract
    We have very successfully developed a novel, IPA free chemical etching process for texturing single crystalline silicon substrates by employing polymer additives with aqueous KOH. In this paper we describe the successful implementation of this IPA free novel texturization process in our baseline single crystalline solar cell flow. The results have been validated with a number of repeated extended run production data. Solar cells fabricated with multiple wafer lots consistently exhibit cell efficiencies greater than 17.5%. It is found that surface texturing capability of this chemistry is slightly better than that of the established KOH/IPA process.
  • Keywords
    elemental semiconductors; etching; solar cells; surface texture; Si; chemical etching process; polymer additive; single crystalline silicon solar cell; texture etching process; Chemicals; Optical reflection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference (PVSC), 2010 35th IEEE
  • Conference_Location
    Honolulu, HI
  • ISSN
    0160-8371
  • Print_ISBN
    978-1-4244-5890-5
  • Type

    conf

  • DOI
    10.1109/PVSC.2010.5614441
  • Filename
    5614441