Surface-Normal Fano Filters and Broadband Reflectors Based on Transferred Silicon Nanomembranes on Glass Substrates

We report here design and experimental results on surface-normal optical filters and broadband reflectors based on Fano resonances in patterned single crystalline silicon nanomembranes (SiNM). Patterned SiNM structures were fabricated and transferred onto transparent glass substrates, using a direct wet transfer process. The measured transmission results agree well with the designs for the filter and for the broadband reflector structures on glass substrates. Further design and process optimizations can lead to high Q filters and high reflectivity broadband reflectors, desirable for ultra-compact surface normal modulators, detectors and light sources.