• DocumentCode
    2739406
  • Title

    Optimization Of Parameters Of Double-pulse Excimer Laser Irradiation For Formation Of Deeply Doped Layer In Silicon

  • Author

    Jyumonji, Masayuki ; Takai, Hiroshi ; Sugioka, Koji ; Toyoda, Koichi

  • Author_Institution
    Tokyo University
  • fYear
    1997
  • fDate
    14-18 July 1997
  • Firstpage
    296
  • Lastpage
    297
  • Keywords
    Doping; Laser beams; Optical pulses; Pulse measurements; Rough surfaces; Space vector pulse width modulation; Surface emitting lasers; Surface morphology; Surface roughness; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
  • Conference_Location
    Chiba, Japan
  • Print_ISBN
    0-7803-3889-8
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1997.610998
  • Filename
    610998
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2739406