Evaluation of magnetic field from varied permutation power transmission line at high technology nano-Fab

Author

Song, Yu-Lin ; Yu, Chwen ; Chuang, Feng-Chang ; Tseng, Ying-Cheng ; Zou, Jyun-Yu ; Shsu, Sen-Gui ; Ma, Tzyh-Ghuang ; Wu, Tzong-Lin ; Chang, Luh-Maan

Author_Institution

Yen Tjing Ling Ind. Res. Inst., Nat. Taiwan Univ., Taipei, Taiwan

fYear

2011

fDate

8-10 June 2011

Firstpage

1

Lastpage

4

Abstract

We present optimal permutation of power transmission lines to reduce electro-magnetic influence at high technology nano-Fab. In this study, the magnetic field was lessened by mirror array power cable system, and simulation of results predicted the best permutations to decrease electromagnetic influence (EMI) value below 0.4 mG at working space without any shielding. Furthermore, this innovative method will cost down at high technology nano-Fab especially for 28 nanometer process.

Keywords

electromagnetic interference; foundries; mirrors; nanotechnology; power cables; power transmission lines; electromagnetic influence; high technology nanofab; magnetic field evaluation; mirror array power cable system; permutation power transmission line; semiconductor foundry; size 28 nm; Clocks; Electromagnetic interference; Magnetic field measurement; Magnetic fields; Noise; Power cables; Electromagnetic influence; Magnetic filed; Optimal permutation; Three phase electric power;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Electronics Systems and Applications (PESA), 2011 4th International Conference on

Conference_Location

Hong Kong

Print_ISBN

978-1-4577-0205-1

Type

conf

DOI

10.1109/PESA.2011.5982953

Filename

5982953