• DocumentCode
    2740124
  • Title

    Single c-domain lead titanate thin films for pyroelectric IR sensors

  • Author

    Wasa, Kiyotaka ; Liu, Frank H M

  • Author_Institution
    Kyoto Univ. Sakyouku, Kyoto
  • fYear
    2006
  • fDate
    18-22 Sept. 2006
  • Firstpage
    352
  • Lastpage
    352
  • Abstract
    High sensitive pyroelectric thin films have been grown for IR sensor. The thin films comprise single c-domain/single crystal of lead titanate (PT) fabricated on MgO substrates by a magnetron sputtering at 600degC followed by a rapid cooling. The PT thin films showed pyroelectric coefficient gamma =3x10-8C/cm2 ldr K with voltage sensitivity gamma /epsiv =0.5x10-9C/cm2 ldr K. The sensitivity was one order in magnitude higher than PZT ceramics.
  • Keywords
    infrared detectors; lead compounds; pyroelectric detectors; sputtered coatings; thin film sensors; MgO; PbTiO3; high-sensitive pyroelectric IR sensors; lead titanate fabrication; magnetron sputtering; pyroelectric coefficient; rapid cooling; single c-domain lead titanate thin films; temperature 600 C; voltage sensitivity; Cooling; Dielectric thin films; Infrared sensors; Pyroelectricity; Sputtering; Stress; Substrates; Thin film sensors; Titanium compounds; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0400-2
  • Electronic_ISBN
    1-4244-0400-2
  • Type

    conf

  • DOI
    10.1109/ICIMW.2006.368560
  • Filename
    4222294
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2740124