• DocumentCode
    2742741
  • Title

    Limitations, Innovations, And Challenges Of Circuits & Devices Into Half-Micron And Beyond

  • Author

    Nagata, M.

  • Author_Institution
    Hitachi Ltd.
  • fYear
    1991
  • fDate
    May 30 1991-June 1 1991
  • Firstpage
    39
  • Lastpage
    42
  • Keywords
    Breakdown voltage; Power dissipation; Semiconductor materials; Signal processing; Switching circuits; Technological innovation; Temperature; Thermal resistance; Very large scale integration; Virtual manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Circuits, 1991. Digest of Technical Papers. 1991 Symposium on
  • Conference_Location
    Oiso, Japan
  • Type

    conf

  • DOI
    10.1109/VLSIC.1991.760069
  • Filename
    760069