Progress of SANYO´s R&D on thin film silicon solar module

Author

Sekimoto, Takeyuki ; Katayama, Hirotaka ; Murata, Kazuya ; Matsumoto, Mitsuhiro ; Kitahara, Akinao ; Hishida, Mitsuoki ; Aya, Youichirou ; Shinohara, Wataru ; Nakagawa, Makoto ; Terakawa, Akira ; Tanaka, Makoto

Author_Institution

Adv. Photovoltaics Dev. Center, SANYO Electr. Co., Ltd., Gifu, Japan

fYear

2010

fDate

20-25 June 2010

Abstract

We have been developing original technologies for Localized Plasma Confinement (LPC) CVD method. LPC-CVD method achieves both a high deposition rate and a high conversion efficiency. From the results of IR analysis and Raman spectroscopy for μc-Si i-layer thin films, it was suggested that the combination of high stretching mode fractions in IR spectra and Raman crystallinity may have a correlation with the conversion efficiency of a-Si/μc-Si tandem cells. An R&D line for processing a-Si/μc-Si solar modules on G5.5 size glass substrates (1100 × 1400 mm²) has been constructed. Module efficiency of 11.1% (Initial) and 10.0% (Stable) has been achieved with a film deposition rate for the μc-Si i-layer of 2.4 nm/s on a G5.5 size substrate.

Keywords

Raman spectroscopy; amorphous semiconductors; elemental semiconductors; infrared spectra; nanostructured materials; plasma CVD; plasma confinement; research and development; semiconductor thin films; silicon; solar cells; μc-Si i-layer thin film; IR spectra; LPC-CVD method; R&D; Raman spectroscopy; Sanyo; Si; a-Si; glass substrate; localized plasma confinement CVD method; mode fraction; tandem cell; thin film silicon solar module; Europe; Films; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Specialists Conference (PVSC), 2010 35th IEEE

Conference_Location

Honolulu, HI

ISSN

0160-8371

Print_ISBN

978-1-4244-5890-5

Type

conf

DOI

10.1109/PVSC.2010.5614744

Filename

5614744