Design and fabrication of linear array IR bolometers using VO/sub 2/ thin films

Vanadium dioxide thin films are materials for uncooled microbolometers due to their high temperature coefficient of resistance (TCR) at room temperature. This paper describes the design and fabrication of 8-element linear array IR uncooled detectors using the films and micromachining technology. The characteristics of the array are investigated in the spectral region of 8-12 /spl mu/m. Tne fabricated detectors exhibit responsivity of over 10 kV/W, detectivity typically exceeding 1.0/spl times/10/sup 8/ cmHz/sup 1/2//W, and thermal time constant of 11 ms, at 300 K and at a frequency of 30 Hz. Furthermore, the uncorrected response uniformity of the linear array bolometers is less than 20%.