Extension of the travel range of a nanoswitch with the usage of a nonlinear backstepping control techniques

In the present article nonlinear backstepping control design techniques for an uncertain system of an electrostatic nanomechanical switch beyond the pull in point, under the presence of Casimir force is proposed. The modelling of the system incorporates the electrostatic force with the fringing field approximations. Two different control design techniques are tested in this paper which are based on the adaptive nonlinear backstepping and sliding mode backstepping control methodologies. In the present case, the system of the nanoswitch also suffers from parametric uncertainties. Different simulation test cases have been examined in order to to prove the effectiveness of the suggested control techniques on the nanoswitch structure.