Silicon Oxynitride Formation In Nitrous Oxide (N/sub 2/O): The Role Of Nitric Oxide (NO)

Author

Tobin, P.J. ; Okada, Y. ; Lahkotia, V. ; Ajuria, S.A. ; Feil, W.A. ; Hegde, R.L.

Author_Institution

Motorola

fYear

1993

fDate

17-19 May 1993

Firstpage

Lastpage

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

DOI

10.1109/VLSIT.1993.760240

Filename

760240

Link To Document