DocumentCode
2746148
Title
20 SSE2 Solid-State Electronics and VLSI
fYear
2006
fDate
6-8 Sept. 2006
Firstpage
58
Lastpage
60
Abstract
Summary form only for tutorial.
Keywords
Annealing; Atmosphere; Electric resistance; Gas detectors; Gold; Semiconductor thin films; Silicon; Solid modeling; Solid state circuits; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical and Electronics Engineering, 2006 3rd International Conference on
Conference_Location
Veracruz
Print_ISBN
1-4244-0402-9
Type
conf
DOI
10.1109/ICEEE.2006.251839
Filename
4018067
Link To Document