Strategy For Gate-Oxide Yield Improvement On CZ And EPI Wafers

Author

Mertens, P.W. ; Schmidt, H.F. ; Meuris, M. ; Verhaverbeke, S. ; Graef, D. ; Dillenbeck, K. ; Salem, S.S. ; Heyns, M.M.

Author_Institution

IMEC

fYear

1993

fDate

17-19 May 1993

Firstpage

111

Lastpage

112

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

DOI

10.1109/VLSIT.1993.760270

Filename

760270

Link To Document