DocumentCode

2746281

Title

Surface Control for ULSIs (Atomic Order Planarization of Si Surfaces)

Author

Yabumoto ; Sinha, Aloka

Author_Institution

NTT

fYear

1993

fDate

17-19 May 1993

Firstpage

118

Lastpage

119

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

conf

DOI

10.1109/VLSIT.1993.760275

Filename

760275