DocumentCode

2746398

Title

Programmable Factory For Adaptable IC Manufacturing

Author

Saraswat, K.C. ; Wood, S.C. ; Plummer, J.D. ; Losleben, P.

Author_Institution

Stanford University

fYear

1993

fDate

17-19 May 1993

Firstpage

131

Lastpage

132

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

conf

DOI

10.1109/VLSIT.1993.760283

Filename

760283